The influence of irradiation and subsequent annealing on Si...

Semiconductors 2000 / 08 Vol. 34; Iss. 8

The influence of irradiation and subsequent annealing on Si nanocrystals formed in SiO2layers

G. A. Kachurin, S. G. Yanovskaya, M. -O. Ruault, A. K. Gutakovskii, K. S. Zhuravlev, O. Kaitasov, H. Bernas
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Volume:
34
Language:
english
Pages:
6
DOI:
10.1134/1.1188109
Date:
August, 2000
File:
PDF, 398 KB
english, 2000
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