Structural transformations and silicon nanocrystallite...

Semiconductors 2001 / 07 Vol. 35; Iss. 7

Structural transformations and silicon nanocrystallite formation in SiOxfilms

V. Ya. Bratus’, V. A. Yukhimchuk, L. I. Berezhinsky, M. Ya. Valakh, I. P. Vorona, I. Z. Indutnyi, T. T. Petrenko, P. E. Shepeliavyi, I. B. Yanchuk
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Volume:
35
Language:
english
Pages:
6
DOI:
10.1134/1.1385719
Date:
July, 2001
File:
PDF, 96 KB
english, 2001
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