Clustering of defects and impurities in hydrogenated...

Semiconductors 2002 / 03 Vol. 36; Iss. 3

Clustering of defects and impurities in hydrogenated single-crystal silicon

Kh. A. Abdulin, Yu. V. Gorelkinskii, B. N. Mukashev, S. Zh. Tokmoldin
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Volume:
36
Language:
english
Pages:
11
DOI:
10.1134/1.1461395
Date:
March, 2002
File:
PDF, 141 KB
english, 2002
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