Ultrasonically stimulated low-temperature redistribution of impurities in silicon
I. V. Ostrovskii, A. B. Nadtochii, A. A. PodolyanVolume:
36
Language:
english
Pages:
3
DOI:
10.1134/1.1469179
Date:
April, 2002
File:
PDF, 49 KB
english, 2002