Determination of the parameters of multilayer nanostructures using two-wave X-ray reflectometry
N. L. Popov, Yu. A. Uspenskii, A. G. Turyanskii, I. V. Pirshin, A. V. Vinogradov, Yu. Ya. PlatonovVolume:
37
Language:
english
Pages:
6
DOI:
10.1134/1.1582534
Date:
June, 2003
File:
PDF, 90 KB
english, 2003