Control of the adhesion strength of thin metal films in...

Russian Microelectronics 2007 / 09 Vol. 36; Iss. 5

Control of the adhesion strength of thin metal films in multilayer structures

Z. I. Taliashvili, L. R. Vardosanidze, L. B. Jangidze, A. N. Tavkhelidze
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Volume:
36
Language:
english
Pages:
8
DOI:
10.1134/s1063739707050058
Date:
September, 2007
File:
PDF, 161 KB
english, 2007
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