Simulation of the effects of deep grooving in silicon in the plasmochemical cyclic process
A. S. Shumilov, I. I. Amirov, V. F. LukichevVolume:
38
Language:
english
Pages:
8
DOI:
10.1134/s1063739709060031
Date:
November, 2009
File:
PDF, 454 KB
english, 2009