Magnetron-assisted deposition of thin (SiC)1-x(AlN)xalloy...

Semiconductors 2010 / 06 Vol. 44; Iss. 6

Magnetron-assisted deposition of thin (SiC)1-x(AlN)xalloy films

M. K. Gusejnov, M. K. Kurbanov, B. A. Bilalov, G. K. Safaraliev
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Volume:
44
Language:
english
Pages:
4
DOI:
10.1134/s1063782610060217
Date:
June, 2010
File:
PDF, 178 KB
english, 2010
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