Specific features of formation of radiation defects in the silicon layer in “silicon-on-insulator” structures
K. D. Shcherbachev, V. T. Bublik, V. N. Mordkovich, D. M. PazhinVolume:
45
Language:
english
Pages:
5
DOI:
10.1134/s1063782611060224
Date:
June, 2011
File:
PDF, 359 KB
english, 2011