DeleCut: Producing High-Quality SOI Structures by Hydrogen...

Russian Microelectronics 2002 / 07 Vol. 31; Iss. 4

DeleCut: Producing High-Quality SOI Structures by Hydrogen Ion Implantation

V. P. Popov, I. V. Antonova, A. A. Frantsuzov, L. N. Safronov, A. I. Popov, O. V. Naumova, A. Kh. Antonenko, D. V. Kilanov, I. V. Mironova
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
31
Language:
english
Pages:
6
DOI:
10.1023/a:1016335113235
Date:
July, 2002
File:
PDF, 369 KB
english, 2002
Conversion to is in progress
Conversion to is failed