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Volume 31; Issue 4
Main
Russian Microelectronics
Volume 31; Issue 4
Russian Microelectronics
Volume 31; Issue 4
1
DeleCut: Producing High-Quality SOI Structures by Hydrogen Ion Implantation
V. P. Popov
,
I. V. Antonova
,
A. A. Frantsuzov
,
L. N. Safronov
,
A. I. Popov
,
O. V. Naumova
,
A. Kh. Antonenko
,
D. V. Kilanov
,
I. V. Mironova
Journal:
Russian Microelectronics
Year:
2002
Language:
english
File:
PDF, 369 KB
Your tags:
english, 2002
2
Open Microwave Resonator Used for the Characterization of a Helicon-Source Plasma
Yu. P. Baryshev
,
I. N. Moskalev
,
I. P. Koritkin
,
A. A. Orlikovsky
,
A. O. Prokof'ev
Journal:
Russian Microelectronics
Year:
2002
Language:
english
File:
PDF, 40 KB
Your tags:
english, 2002
3
Carrier Trapping and Scattering in Ge-Doped SiO2
D. I. Brinkevich
,
V. S. Prosolovich
,
Yu. N. Yankovskii
Journal:
Russian Microelectronics
Year:
2002
Language:
english
File:
PDF, 28 KB
Your tags:
english, 2002
4
Structural and Behavioral Irreproducibility of Solid Materials: A New Insight into the Problem
N. V. Bodyagin
,
S. P. Vikhrov
,
S. M. Mursalov
,
I. V. Tarasov
Journal:
Russian Microelectronics
Year:
2002
Language:
english
File:
PDF, 41 KB
Your tags:
english, 2002
5
ULSI Gap Filling with a Thin CVD SiO2-Based Insulator: A Review
V. Y. Vassiliev
Journal:
Russian Microelectronics
Year:
2002
Language:
english
File:
PDF, 70 KB
Your tags:
english, 2002
6
Linear Standard for SEM–AFM Microelectronics Dimensional Metrology in the Range 0.01–100 μm
Ch. P. Volk
,
E. S. Gornev
,
Yu. A. Novikov
,
Yu. V. Ozerin
,
Yu. I. Plotnikov
,
A. M. Prokhorov
,
A. V. Rakov
Journal:
Russian Microelectronics
Year:
2002
Language:
english
File:
PDF, 1.05 MB
Your tags:
english, 2002
7
Photoresists Used as Mask Materials in Ion Implantation for the CMOS Technology: Optimizing Mask Thickness
S. V. Gran'ko
,
F. F. Komarov
,
A. V. Leont'ev
Journal:
Russian Microelectronics
Year:
2002
Language:
english
File:
PDF, 216 KB
Your tags:
english, 2002
8
Lateral Injection Utilized for Improving the Performance of Microwave Bipolar Transistors
Yu. P. Snitovskii
Journal:
Russian Microelectronics
Year:
2002
Language:
english
File:
PDF, 50 KB
Your tags:
english, 2002
9
Polarity-Dependent Electrical Mass Transfer in Silicon: The Location and Shape of the Metal-like Bridge
B. A. Panfilov
Journal:
Russian Microelectronics
Year:
2002
Language:
english
File:
PDF, 123 KB
Your tags:
english, 2002
10
Effect of Gamma Irradiation on the Surface Morphology of SOS Films
A. N. Kiselev
,
G. A. Maksimov
,
V. A. Perevoshchikov
,
V. D. Skupov
,
D. O. Filatov
Journal:
Russian Microelectronics
Year:
2002
Language:
english
File:
PDF, 244 KB
Your tags:
english, 2002
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