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Linear Standard for SEM–AFM Microelectronics Dimensional Metrology in the Range 0.01–100 μm
Ch. P. Volk, E. S. Gornev, Yu. A. Novikov, Yu. V. Ozerin, Yu. I. Plotnikov, A. M. Prokhorov, A. V. RakovVolume:
31
Language:
english
Pages:
17
DOI:
10.1023/a:1016384612327
Date:
July, 2002
File:
PDF, 1.05 MB
english, 2002