Annealing of Radiation and Electrostatic-Discharge Damages...

Russian Microelectronics 2002 / 09 Vol. 31; Iss. 5

Annealing of Radiation and Electrostatic-Discharge Damages in Semiconductor Devices

M. I. Gorlov, D. A. Litvinenko
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Volume:
31
Language:
english
Pages:
10
DOI:
10.1023/a:1020286908612
Date:
September, 2002
File:
PDF, 147 KB
english, 2002
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