Deflection detection and feedback actuation using a...

Deflection detection and feedback actuation using a self‐excited piezoelectric Pb(Zr,Ti)O3 microcantilever for dynamic scanning force microscopy

Itoh, T., Lee, C., Suga, T.
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Volume:
69
Year:
1996
Language:
english
DOI:
10.1063/1.116871
File:
PDF, 320 KB
english, 1996
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