Recent developments of focused ion beam implanter
H. Kasahara, H. Sawaragi, R. Mimura, R. Aihara, K. Nakamura, S. Matsui, T. Nozaki, W.B. Thompson, M.H. ShearerVolume:
11
Year:
1990
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(90)90142-g
File:
PDF, 301 KB
english, 1990