Temperature stable Pd ohmic contacts to p-type 4H-SiC...

IEEE Transactions on Electron Devices 1999 Vol. 46; Iss. 3

Temperature stable Pd ohmic contacts to p-type 4H-SiC formed at low temperatures

Kassamakova, L., Kakanakov, R.D., Kassamakov, I.V., Nordell, N., Savage, S., Hjorvarsson, B., Svedberg, E.B., Aborn, L., Madsen, L.D.
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Volume:
46
Year:
1999
Language:
english
Pages:
7
DOI:
10.1109/16.748885
File:
PDF, 900 KB
english, 1999
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