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Temperature stable Pd ohmic contacts to p-type 4H-SiC formed at low temperatures
Kassamakova, L., Kakanakov, R.D., Kassamakov, I.V., Nordell, N., Savage, S., Hjorvarsson, B., Svedberg, E.B., Aborn, L., Madsen, L.D.Volume:
46
Year:
1999
Language:
english
Pages:
7
DOI:
10.1109/16.748885
File:
PDF, 900 KB
english, 1999