On batch homogeneity in horizontal CVD reactors (I). Model...

On batch homogeneity in horizontal CVD reactors (I). Model of heating the process gas

Dr. F. Richter
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Volume:
18
Year:
1983
Language:
english
Pages:
12
DOI:
10.1002/crat.2170180416
File:
PDF, 604 KB
english, 1983
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