The Reactive Ion Etching of Gallium Nitride by Methylchloride/Hydrogen
M. Dineen, H. Thomas, B. Humphreys, S. G. McMeekinVolume:
176
Year:
1999
Language:
english
Pages:
4
DOI:
10.1002/(sici)1521-396x(199911)176:13.0.co;2-v
File:
PDF, 128 KB
english, 1999