Palladium thin films grown by CVD from (1,1,1,5,5,5-hexafluoro-2,4-pentanedionato) palladium(II)
Vijay Bhaskaran, Prof. Mark J. Hampden-Smith, Prof. Toivo T. KodasVolume:
3
Year:
1997
Language:
english
Pages:
6
DOI:
10.1002/cvde.19970030506
File:
PDF, 1.14 MB
english, 1997