Development of two step carbon dioxide assisted thermal...

Microsystem Technologies 2012 / 04 Vol. 18; Iss. 4

Development of two step carbon dioxide assisted thermal fusion PMMA bonding process

Chia-Lin Wu, Chen-Chung Li, Chia-Fong Lu, Sen-Yeu Yang
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Volume:
18
Language:
english
Pages:
6
DOI:
10.1007/s00542-012-1427-y
Date:
April, 2012
File:
PDF, 386 KB
english, 2012
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