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Volume 18; Issue 4
Main
Microsystem Technologies
Volume 18; Issue 4
Microsystem Technologies
Volume 18; Issue 4
1
A review of fabrication processes for vertical comb drives
Else Gallagher
,
Walied Moussa
,
Mark McDermott
Journal:
Microsystem Technologies
Year:
2012
Language:
english
File:
PDF, 523 KB
Your tags:
english, 2012
2
Laser fabrication of micropores and their integration to microfluidic platforms for DNA electrophoresis
B. Lerner
,
M. S. Perez
,
P. A. Kler
,
C. L. A. Berli
,
A. F. Ordoñez Arias
,
F. Sacco
,
C. Toro
,
C. A. Rinaldi
Journal:
Microsystem Technologies
Year:
2012
Language:
english
File:
PDF, 514 KB
Your tags:
english, 2012
3
VM-TEST: Mechanical property measurement using electrostatically actuated vertical MEMS test structures fabricated in thick metal layers
Darcy T. Haluzan
,
David M. Klymyshyn
,
Sven Achenbach
,
Martin Börner
,
Jürgen Mohr
Journal:
Microsystem Technologies
Year:
2012
Language:
english
File:
PDF, 566 KB
Your tags:
english, 2012
4
Replication of precise polymeric microlens arrays combining ultra-precision diamond ball-end milling and micro injection molding
S. Kirchberg
,
L. Chen
,
L. Xie
,
G. Ziegmann
,
B. Jiang
,
K. Rickens
,
O. Riemer
Journal:
Microsystem Technologies
Year:
2012
Language:
english
File:
PDF, 550 KB
Your tags:
english, 2012
5
Wafer-level fabrication process for fully encapsulated micro-supercapacitors with high specific energy
Hugo Durou
,
David Pech
,
David Colin
,
Patrice Simon
,
Pierre-Louis Taberna
,
Magali Brunet
Journal:
Microsystem Technologies
Year:
2012
Language:
english
File:
PDF, 639 KB
Your tags:
english, 2012
6
Micro-mirror laser scanner combined with a varifocal mirror
R. Hokari
,
K. Hane
Journal:
Microsystem Technologies
Year:
2012
Language:
english
File:
PDF, 708 KB
Your tags:
english, 2012
7
A contact lens with integrated micro solar cells
Andrew R. Lingley
,
Brian P. Otis
,
Tueng T. Shen
,
Babak A. Parviz
Journal:
Microsystem Technologies
Year:
2012
Language:
english
File:
PDF, 416 KB
Your tags:
english, 2012
8
A new S-shaped MEMS PZT cantilever for energy harvesting from low frequency vibrations below 30
Huicong Liu
,
Chengkuo Lee
,
Takeshi Kobayashi
,
Cho Jui Tay
,
Chenggen Quan
Journal:
Microsystem Technologies
Year:
2012
Language:
english
File:
PDF, 787 KB
Your tags:
english, 2012
9
Rubber-assisted embossing of polymer thin films using molds with through-thickness microchannels
Danyang Zhao
,
Tom Wyatt
,
Minjie Wang
,
Allen Yi
,
Donggang Yao
Journal:
Microsystem Technologies
Year:
2012
Language:
english
File:
PDF, 561 KB
Your tags:
english, 2012
10
Development of two step carbon dioxide assisted thermal fusion PMMA bonding process
Chia-Lin Wu
,
Chen-Chung Li
,
Chia-Fong Lu
,
Sen-Yeu Yang
Journal:
Microsystem Technologies
Year:
2012
Language:
english
File:
PDF, 386 KB
Your tags:
english, 2012
11
A planar micro-concentrator/injector for low power consumption microchromatographic analysis of benzene and 1,3 butadiene
H. Lahlou
,
J.-B. Sanchez
,
Y. Mohsen
,
X. Vilanova
,
F. Berger
,
E. Llobet
,
X. Correig
,
V. Fierro
,
A. Celzard
,
I. Gràcia
,
C. Cané
Journal:
Microsystem Technologies
Year:
2012
Language:
english
File:
PDF, 506 KB
Your tags:
english, 2012
12
A novel approach for increasing the strength of an Au/Si eutectic bonded interface on an oxidized silicon surface
M. Haubold
,
Y.-C. Lin
,
J. Frömel
,
M. Wiemer
,
M. Esashi
,
T. Geßner
Journal:
Microsystem Technologies
Year:
2012
Language:
english
File:
PDF, 527 KB
Your tags:
english, 2012
13
Enhancement of PZT embedded swing arm actuator using integrated read/write performance and actuation
Yu-Cheng Lin
,
Po-Chien Chou
,
Stone Cheng
Journal:
Microsystem Technologies
Year:
2012
Language:
english
File:
PDF, 687 KB
Your tags:
english, 2012
14
Quality control for deep x-ray lithography (LIGA): a preliminary metrology study
Pascal Meyer
,
James D. Claverley
,
Richard K. Leach
Journal:
Microsystem Technologies
Year:
2012
Language:
english
File:
PDF, 571 KB
Your tags:
english, 2012
15
Detailed investigation of capacitive micromachined ultrasonic transducer design space
Onursal Onen
,
Rasim Guldiken
Journal:
Microsystem Technologies
Year:
2012
Language:
english
File:
PDF, 686 KB
Your tags:
english, 2012
16
Effect of die attachment on key dynamical parameters of micromachined gyroscopes
Zhanqiang Hou
,
Dingbang Xiao
,
Xuezhong Wu
,
Jianbin Su
,
Zhihua Chen
,
Xu Zhang
Journal:
Microsystem Technologies
Year:
2012
Language:
english
File:
PDF, 792 KB
Your tags:
english, 2012
17
Insight into the micro scale dynamics of a micro fluidic wetting-based conveying system by particle based simulation
Jan Lienemann
,
Dennis Weiß
,
Andreas Greiner
,
David Kauzlaric
,
Oliver Grünert
,
Jan G. Korvink
Journal:
Microsystem Technologies
Year:
2012
Language:
english
File:
PDF, 492 KB
Your tags:
english, 2012
18
A method of water pretreatment to improve the thermal bonding rate of PMMA microfluidic chip
Liqun Du
,
Hongling Chang
,
Mancang Song
,
Chong Liu
Journal:
Microsystem Technologies
Year:
2012
Language:
english
File:
PDF, 324 KB
Your tags:
english, 2012
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