A miniaturized bulk micromachined triaxial accelerometer...

Microsystem Technologies 2012 / 05 Vol. 18; Iss. 5

A miniaturized bulk micromachined triaxial accelerometer fabricated using deep reactive etching through a multilevel thickness membrane

Luca Petricca, Christopher Grinde, Per Ohlckers
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Volume:
18
Language:
english
Pages:
10
DOI:
10.1007/s00542-012-1429-9
Date:
May, 2012
File:
PDF, 818 KB
english, 2012
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