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Volume 18; Issue 5
Main
Microsystem Technologies
Volume 18; Issue 5
Microsystem Technologies
Volume 18; Issue 5
1
A miniaturized bulk micromachined triaxial accelerometer fabricated using deep reactive etching through a multilevel thickness membrane
Luca Petricca, Christopher Grinde, Per Ohlckers
Journal:
Microsystem Technologies
Year:
2012
Language:
english
File:
PDF, 818 KB
Your tags:
english, 2012
2
Polyimide/tetraethoxysilane-based hybrid polyfilms for microelectronics application
S. K. Kurmvanshi, P. R. Patel, A. K. Patel, R. Bajpai, J. M. Keller
Journal:
Microsystem Technologies
Year:
2012
Language:
english
File:
PDF, 808 KB
Your tags:
english, 2012
3
Low temperature deposited titanium boride thin films and their application to surface engineering of microscale mold inserts
Yang Mu, Ke Chen, W. J. Meng, Fanghua Mei
Journal:
Microsystem Technologies
Year:
2012
Language:
english
File:
PDF, 1.16 MB
Your tags:
english, 2012
4
A novel DMTL capacitive switch with electrostatic actuation MAM capacitors
Cheng Deng, Jingfu Bao, Yijia Du, Xinghai Zhao
Journal:
Microsystem Technologies
Year:
2012
Language:
english
File:
PDF, 502 KB
Your tags:
english, 2012
5
Investigation of wax and paper materials for the fabrication of paper-based microfluidic devices
Z. W. Zhong, Z. P. Wang, G. X. D. Huang
Journal:
Microsystem Technologies
Year:
2012
Language:
english
File:
PDF, 742 KB
Your tags:
english, 2012
6
Multi-dofs MEMS displacement sensors based on the Stewart platform theory
Andrea Mura
Journal:
Microsystem Technologies
Year:
2012
Language:
english
File:
PDF, 248 KB
Your tags:
english, 2012
7
Piezoresistive polypropylene–carbon nanofiber composites as mechanical transducers
A. J. Paleo, F. W. J. van Hattum, J. G. Rocha, S. Lanceros-Méndez
Journal:
Microsystem Technologies
Year:
2012
Language:
english
File:
PDF, 896 KB
Your tags:
english, 2012
8
Fabrication of PZT nano dot array and their ferroelectric properties
Gaoyang Zhao, Zhezhe Wang, Guomin Xu, Xiaocui Deng
Journal:
Microsystem Technologies
Year:
2012
Language:
english
File:
PDF, 269 KB
Your tags:
english, 2012
9
Manufacturing and replication of glass pyramidal micro-structures by using the injection moulding process
M. Sahli, C. Millot, J.-C Gelin, T. Barrière
Journal:
Microsystem Technologies
Year:
2012
Language:
english
File:
PDF, 992 KB
Your tags:
english, 2012
10
Static characterization of microstructures using AOMSI and temporal phase-shifting (TPS) methods
Davoud Jahani, Sivakumar Narayanswamy, Muthukumaran Packirisamy, Murali Manohohar Pai
Journal:
Microsystem Technologies
Year:
2012
Language:
english
File:
PDF, 481 KB
Your tags:
english, 2012
11
Fabrication of polymer micro-tip by optical lensing technique
Pradip Kumar Dey, Soumen Das, Pranabendu Ganguly
Journal:
Microsystem Technologies
Year:
2012
Language:
english
File:
PDF, 384 KB
Your tags:
english, 2012
12
Robust regulation and tracking system design for multivariable control of the tape transport mechanism
Hamed Moradi, Firooz Bakhtiari-Nejad, Aria Alasty
Journal:
Microsystem Technologies
Year:
2012
Language:
english
File:
PDF, 1.14 MB
Your tags:
english, 2012
13
A passive mechanism for thermal stress regulation in micro-machined beam-type structures
Pezhman A. Hassanpour, Patricia M. Nieva, Amir Khajepour
Journal:
Microsystem Technologies
Year:
2012
Language:
english
File:
PDF, 556 KB
Your tags:
english, 2012
14
Study of dynamic characteristics of resonators for MEMS resonant vibratory gyroscopes
Li Yan, Fan Shangchun, Guo Zhanshe, Li Jing, Cao Le
Journal:
Microsystem Technologies
Year:
2012
Language:
english
File:
PDF, 843 KB
Your tags:
english, 2012
15
Fabrication and measurements of dynamic response of an SOI based non-planar CMUT array
Tugrul Zure, Sazzadur Chowdhury
Journal:
Microsystem Technologies
Year:
2012
Language:
english
File:
PDF, 1.07 MB
Your tags:
english, 2012
16
Measurement of contact potential difference in head disk interface by readback signal spectrum
Mingsheng Zhang, Bo Liu
Journal:
Microsystem Technologies
Year:
2012
Language:
english
File:
PDF, 318 KB
Your tags:
english, 2012
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