Effect of die attachment on key dynamical parameters of micromachined gyroscopes
Zhanqiang Hou, Dingbang Xiao, Xuezhong Wu, Jianbin Su, Zhihua Chen, Xu ZhangVolume:
18
Language:
english
Pages:
7
DOI:
10.1007/s00542-012-1456-6
Date:
April, 2012
File:
PDF, 792 KB
english, 2012