Smart ultrasonic sensors systems: potential of aluminum nitride thin films for the excitation of the ultrasound at high frequencies
Susan Walter, Thomas Herzog, Henning Heuer, Hagen Bartzsch, Daniel GloessVolume:
18
Language:
english
Pages:
7
DOI:
10.1007/s00542-012-1478-0
Date:
August, 2012
File:
PDF, 522 KB
english, 2012