Volume 18; Issue 7-8

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Microsystem Technologies
Volume 18; Issue 7-8

Microsystem Technologies

Volume 18; Issue 7-8

1

Metallo-porphyrin zinc as gas sensitive material for colorimetric gas sensors on planar optical waveguides

Carolin Peter, Katrin Schmitt, Martin Apitz, Juergen Woellenstein

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 310 KB

english, 2012

2

Cleaning of structured templates from nanoparticle accumulation using silicone

S. Merzsch, H. S. Wasisto, A. Waag, I. Kirsch, E. Uhde, T. Salthammer, E. Peiner

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 866 KB

english, 2012

3

Low-cost fiber-optic waveguide sensor for the colorimetric detection of ammonia

Katrin Schmitt, Jonas Rist, Carolin Peter, Jürgen Wöllenstein

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 588 KB

english, 2012

4

Thermopile-based THz antenna

Béla Szentpáli, Gábor Matyi, Péter Fürjes, Endre László, Gábor Battistig, István Bársony, Gergely Károlyi, Tibor Berceli

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 704 KB

english, 2012

5

Nanowire silicon as a material for thermoelectric energy conversion

A. Stranz, J. Kähler, S. Merzsch, A. Waag, E. Peiner

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 385 KB

english, 2012

6

Platinated ultrathin films made of carbon nanotubes

Timo Bohnenberger, Frank Steinhäußer, Jovan Matovic, Ulrich Schmid

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 648 KB

english, 2012

7

Fabrication, packaging, and characterization of p-SOI Wheatstone bridges for harsh environments

J. Kähler, A. Stranz, L. Doering, S. Merzsch, N. Heuck, A. Waag, E. Peiner

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 846 KB

english, 2012

8

Long-term stability of Ag and Cu thin films on glass, LTCC and alumina substrates

A. Bittner, N. Pagel, H. Seidel, U. Schmid

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 545 KB

english, 2012

9

Microfabricated self-resonant structure as a passive wireless dielectric constant and conductivity sensor

Sheng Zhang, Praveenkumar Pasupathy, Dean P. Neikirk

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 554 KB

english, 2012

10

Design and evaluation process of a robust pressure sensor for measurements in boundary layers of liquid fluids

T. Beutel, M. Leester-Schädel, S. Büttgenbach

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 726 KB

english, 2012

11

Determination of exposure to engineered carbon nanoparticles using a self-sensing piezoresistive silicon cantilever sensor

H. S. Wasisto, S. Merzsch, A. Waag, I. Kirsch, E. Uhde, T. Salthammer, E. Peiner

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 819 KB

english, 2012

12

Selective modal excitation in coupled piezoelectric microcantilevers

M. Gil, T. Manzaneque, J. Hernando-García, A. Ababneh, H. Seidel, J. L. Sánchez-Rojas

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 636 KB

english, 2012

13

Micro harvester using isotropic charging of electrets deposited on vertical sidewalls for conversion of 3D vibrational energy

Ulrich Mescheder, Antwi Nimo, Bernhard Müller, Awad Saad Abou Elkeir

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 803 KB

english, 2012

14

Measurement of Young’s modulus and residual stress of thin SiC layers for MEMS high temperature applications

Oliver Pabst, Michael Schiffer, Ernst Obermeier, Tolga Tekin, Klaus Dieter Lang, Ha-Duong Ngo

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 598 KB

english, 2012

15

Hardware implementation of an electrostatic MEMS-actuator linearization

F. Mair, M. Egretzberger, A. Kugi

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 1.14 MB

english, 2012

16

Gold-based thin multilayers for ohmic contacts in RF-MEMS switches

V. Mulloni, J. Iannacci, R. Bartali, V. Micheli, S. Colpo, N. Laidani, B. Margesin

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 384 KB

english, 2012

17

Measurement technique for the thermal properties of thin-film diaphragms embedded in calorimetric flow sensors

Roman Beigelbeck, Samir Cerimovic, Almir Talic, Franz Kohl, Franz Keplinger

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 937 KB

english, 2012

18

Role of the electro-thermo-mechanical multiple coupling on the operation of RF-microswitch

Eugenio Brusa, Mircea Gheorghe Munteanu

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 811 KB

english, 2012

19

Modelling and characterization of AlN-actuated microcantilevers vibrating in the first in-plane mode

V. Ruiz, J. Hernando-García, A. Ababneh, H. Seidel, U. Schmid, J. L. Sánchez-Rojas

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 363 KB

english, 2012

20

Artificial intelligence based optimization for vibration energy harvesting applications

Zdenek Hadas, Jiri Kurfurst, Cestmir Ondrusek, Vladislav Singule

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 600 KB

english, 2012

21

New method for selectivity enhancement of SiC field effect gas sensors for quantification of NOx

Christian Bur, Peter Reimann, Mike Andersson, Anita Lloyd Spetz, Andreas Schütze

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 1.27 MB

english, 2012

22

Studies on SiC, DLC and TiO2thin films as piezoresistive sensor materials for high temperature application

M. A. Fraga, H. Furlan, R. S. Pessoa, L. A. Rasia, C. F. R. Mateus

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 308 KB

english, 2012

23

Modeling the performance of a micromachined piezoelectric energy harvester

Ali B. Alamin Dow, M. Schneider, David Koo, Hasan A. Al-Rubaye, A. Bittner, U. Schmid, Nazir Kherani

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 497 KB

english, 2012

24

Sensing viscosity and density of glycerol–water mixtures utilizing a suspended plate MEMS resonator

Samir Cerimovic, Roman Beigelbeck, Hannes Antlinger, Johannes Schalko, Bernhard Jakoby, Franz Keplinger

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 967 KB

english, 2012

25

Through wafer via holes manufacturing by variable isotropy Deep RIE process for RF applications

D. Vasilache, S. Colpo, F. Giacomozzi, S. Ronchin, S. Gennaro, A. Q. A. Qureshi, B. Margesin

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 749 KB

english, 2012

26

CMOS: compatible wafer bonding for MEMS and wafer-level 3D integration

Viorel Dragoi, Eric Pabo, Jürgen Burggraf, Gerald Mittendorfer

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 728 KB

english, 2012

27

MEMS-based microthruster with integrated platinum thin film resistance temperature detector (RTD), heater meander and thermal insulation for operation up to 1,000°C

Natsuki Miyakawa, Wolfgang Legner, Thomas Ziemann, Dimitri Telitschkin, Hans-Jörg Fecht, Alois Friedberger

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 1.03 MB

english, 2012

28

Resonantly excited AlN-based microcantilevers for immunosensing

M. J. Oliver, J. Hernando-García, A. Ababneh, H. Seidel, U. Schmid, J. P. Andrés, P. Pobedinskas, K. Haenen, J. L. Sánchez-Rojas

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 402 KB

english, 2012

29

Micromechanical force sensors based on SU-8 resist

A. Jordan, S. Büttgenbach

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 413 KB

english, 2012

30

Multi-channel conical microstructures: perspectives

Sergey Sukhoveyev

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 344 KB

english, 2012

31

Novel 3D manufacturing method combining microelectrial discharge machining and electrochemical polishing

Claudia Richter, Thomas Krah, Stephanus Büttgenbach

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 587 KB

english, 2012

32

Cantilever probes for high speed AFM

C. Richter, P. Weinzierl, W. Engl, C. Penzkofer, B. Irmer, T. Sulzbach

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 502 KB

english, 2012

33

Hysteresis correction of tactile sensor response with a generalized Prandtl–Ishlinskii model

José A. Sánchez-Durán, Óscar Oballe-Peinado, Julián Castellanos-Ramos, Fernando Vidal-Verdú

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 1.26 MB

english, 2012

34

Modeling of gold microbeams as strain and pressure sensors for characterizing MEMS packages

A. Faes, G. Resta, F. Solazzi, B. Margesin

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 478 KB

english, 2012

35

A MEMS-based thermal infrared emitter for an integrated NDIR spectrometer

C. Calaza, M. Salleras, N. Sabaté, J. Santander, C. Cané, L. Fonseca

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 627 KB

english, 2012

36

Flexible and large area pressure sensors for human-neuroprostheses and human-neurorobotic interface assessment

J. Herrán, I. Fernández, E. Ochoteco, G. Cabañero, H. Grande, J. C. Moreno, E. Rocón, J. L. Pons

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 777 KB

english, 2012

37

Integration of impedance spectroscopy sensors in a digital microfluidic platform

Thomas Lederer, Stefan Clara, Bernhard Jakoby, Wolfgang Hilber

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 1.33 MB

english, 2012

38

Power supply sources based on resonant energy harvesting

P. Fiala, P. Drexler

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 1.21 MB

english, 2012

39

Special issue of the conference ‘Smart Sensors, Actuators and MEMS’, within the SPIE EUROPE Symposium ‘MICROTECHNOLOGIES’ Prague, Czech Republic, 18–20 April 2011

Ulrich Schmid, Thomas Becker, Bernd Michel

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 119 KB

english, 2012

40

Smart ultrasonic sensors systems: potential of aluminum nitride thin films for the excitation of the ultrasound at high frequencies

Susan Walter, Thomas Herzog, Henning Heuer, Hagen Bartzsch, Daniel Gloess

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 522 KB

english, 2012

41

Battery-and wire-less tire pressure measurement systems (TPMS) sensor

Noaman Makki, Remon Pop-Iliev

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 918 KB

english, 2012

42

Thin-film electro-acoustic sensors based on AlN and its alloys: possibilities and limitations

Gunilla Wingqvist

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 482 KB

english, 2012

43

Binary Zero-Power Sensors: an alternative solution for power-free energy-autonomous sensor systems

Thomas Frank, Gerald Gerlach, Arndt Steinke

Journal:

Microsystem Technologies

Year:

2012

Language:

english

File:

PDF, 508 KB

english, 2012