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Fabrication and measurements of dynamic response of an SOI based non-planar CMUT array
Tugrul Zure, Sazzadur ChowdhuryVolume:
18
Language:
english
Pages:
10
DOI:
10.1007/s00542-012-1500-6
Date:
May, 2012
File:
PDF, 1.07 MB
english, 2012