Deep-UV antireflective coating: ellipsometry and XPS characterization
X. Boddaert, A. Caramante, E. Josse, B. DelahayeVolume:
30
Year:
2000
Language:
english
Pages:
3
DOI:
10.1002/1096-9918(200008)30:13.0.co;2-q
File:
PDF, 66 KB
english, 2000