Compositional analysis of amorphous SiNx: H films by ERDA and infrared spectroscopy
W. Bohne, W. Fuhs, J. Röhrich, B. Selle, G. González-Díaz, I. Mártil, F. L. Martínez, A. del PradoVolume:
30
Year:
2000
Language:
english
Pages:
4
DOI:
10.1002/1096-9918(200008)30:13.0.co;2-c
File:
PDF, 146 KB
english, 2000