Optical characterization of inhomogeneous thin films of ZrO2 by spectroscopic ellipsometry and spectroscopic reflectometry
D. Franta, I. OhlídalVolume:
30
Year:
2000
Language:
english
Pages:
6
DOI:
10.1002/1096-9918(200008)30:13.0.co;2-u
File:
PDF, 89 KB
english, 2000