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Detailed study about influence of oxygen on trap properties in SiOxNy by the thermally stimulated current and maximum entropy method
Yoshiki Yonamoto, Yutaka Inaba, Naotoshi AkamatsuVolume:
64
Year:
2011
Language:
english
Pages:
3
DOI:
10.1016/j.sse.2011.06.047
File:
PDF, 364 KB
english, 2011