Study on precipitations of fluorine-doped silicon oxide
Jun Wu, Ying-Lang Wang, Chuan-Pu Liu, Shih-Chieh Chang, Cheng-Tzu Kuo, Chyung AyVolume:
447-448
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2003.07.029
File:
PDF, 623 KB
english, 2004