Volume 447-448; Issue none

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Thin Solid Films
Volume 447-448; Issue none

Thin Solid Films

Volume 447-448; Issue none

1

Fabrication of colloidal self-assembled monolayer (SAM) using monodisperse silica and its use as a lithographic mask

Hwa-young Ko, Hae-Weon Lee, Jooho Moon

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 2.99 MB

english, 2004

2

Influence of pH on structural and electrical properties of sol–gel derived (Ba, Sr)TiO3 thin films under humid conditions

Seema Agarwal, S.B Samanta, G.L Sharma

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 1005 KB

english, 2004

3

Effect of additive gases on the selective etching of tungsten films using inductively coupled halogen-based plasmas

S.D. Park, Y.J. Lee, N.G. Cho, S.G. Kim, H.H. Choe, M.P. Hong, G.Y. Yeom

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 227 KB

english, 2004

4

Fast and slow decay of ion beam induced electron emission in boron doped hydrogenated CVD diamond films

V Richter, Y Avigal

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 105 KB

english, 2004

5

Electrically conducting polyaniline microtube blends

A.R. Hopkins, R.A. Lipeles, W.H. Kao

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 660 KB

english, 2004

6

Design and performance of an electrothermal MEMS microengine capable of bi-directional motion

Edward S Kolesar, William E Odom, Joseph A Jayachandran, Matthew D Ruff, Simon Y Ko, Jeffery T Howard, Peter B Allen, Josh M Wilken, Noah C Boydston, Jorge E Bosch, Richard J Wilks, Justin B McAlliste

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 2.35 MB

english, 2004

7

Ferromagnetism in GaN and SiC doped with transition metals

S.J. Pearton, Y.D. Park, C.R. Abernathy, M.E. Overberg, G.T. Thaler, J. Kim, F. Ren, J.M. Zavada, R.G. Wilson

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 663 KB

english, 2004

8

High quality r.f. sputtered metal oxides (Ta2O5, HfO2) and their properties after annealing

H. Grüger, Ch. Kunath, E. Kurth, S. Sorge, W. Pufe, T. Pechstein

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 844 KB

english, 2004

9

Extraction of electrical mechanisms of low-dielectric constant material MSZ for interconnect applications

T.C. Chang, S.T. Yan, P.T. Liu, Z.W. Lin, H. Aoki, S.M. Sze

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 245 KB

english, 2004

10

Evaluation of advanced chemical mechanical planarization techniques for copper damascene interconnect

K.W. Chen, Y.L. Wang, C.P. Liu, Kevin Yang, L. Chang, K.Y. Lo, C.W. Liu

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 153 KB

english, 2004

11

Hybrid organo-ceramic corrosion protection coatings with encapsulated organic corrosion inhibitors

A.N. Khramov, N.N. Voevodin, V.N. Balbyshev, M.S. Donley

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 2.71 MB

english, 2004

12

Comparative study of Mg doped ZnO and multilayer ZnO/MgO thin films

P. Bhattacharya, Rasmi R. Das, Ram S. Katiyar

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 120 KB

english, 2004

13

The evaporative deposition of aluminum coatings and shapes with grain size control

Alan Jankowski, Jeffrey Hayes

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 597 KB

english, 2004

14

Investigation of the bonding states of the SiO2 aerogel film/metal interface

Sang-Bae Jung, Hyung-Ho Park, Haecheon Kim

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 159 KB

english, 2004

15

Application of SiO2 aerogel film for interlayer dielectric on GaAs with a barrier of Si3N4

Sang-Bae Jung, Sung-Woo Park, Jun-Kyu Yang, Hyung-Ho Park, Haecheon Kim

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 222 KB

english, 2004

16

Characterization of polymer-like thin films deposited on silicon and glass substrates using PECVD method

M.-C. Kim, S.-H. Cho, S.-B. Lee, Y. Kim, J.-H. Boo

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 725 KB

english, 2004

17

Fabrication and characterization of high frequency SAW device with IDT/ZnO/AlN/Si configuration: role of AlN buffer

Jun-Phil Jung, Jin-Bock Lee, Jung-Sun Kim, Jin-Seok Park

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 217 KB

english, 2004

18

Effects of bottom electrodes on the orientation of AlN films and the frequency responses of resonators in AlN-based FBARs

Jin-Bock Lee, Jun-Phil Jung, Myung-Ho Lee, Jin-Seok Park

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 816 KB

english, 2004

19

Characteristics of rapid-thermal-annealed LiNi1−xCoxO2 cathode films for all-solid-state rechargeable thin film microbatteries

Han-Ki Kim, Tae-Yeon Seong, Young Soo Yoon

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 1.11 MB

english, 2004

20

Copper surface protection with a completely enclosed copper structure for a damascene process

T.C. Wang, T.E. Hsieh, Y.L. Wang, Y.L. Wu, K.Y. Lo, C.W. Liu, K.W. Chen

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 1.58 MB

english, 2004

21

Investigation of quaternary Al-based quasicrystal thin films for corrosion protection

V.N. Balbyshev, D.J. King, A.N. Khramov, L.S. Kasten, M.S. Donley

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 1.15 MB

english, 2004

22

Improvement of the surface characteristics of sputtered metal layer for a MEMS micro-mirror switch

M.-W. Lee, S.-B. Jo, K.-C. Lee, C.-W. Kim, S.-G. Park, S.-G. Lee, E.-H. Lee, Beom-Hoan. O.

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 422 KB

english, 2004

23

CMP of ultra low-k material porous-polysilazane (PPSZ) for interconnect applications

T.C Chang, T.M Tsai, P.T Liu, C.W Chen, S.T Yan, H Aoki, Y.C Chang, T.Y Tseng

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 1.35 MB

english, 2004

24

Study on precipitations of fluorine-doped silicon oxide

Jun Wu, Ying-Lang Wang, Chuan-Pu Liu, Shih-Chieh Chang, Cheng-Tzu Kuo, Chyung Ay

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 623 KB

english, 2004

25

Performance and characterisation of CVD diamond coated, sintered diamond and WC–Co cutting tools for dental and micromachining applications

Htet Sein, Waqar Ahmed, Mark Jackson, Robert Woodwards, Riccardo Polini

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 2.12 MB

english, 2004

26

Passivation of type II InAs/GaSb superlattice photodiodes

Aaron Gin, Yajun Wei, Junjik Bae, Andrew Hood, Jongbum Nah, Manijeh Razeghi

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 276 KB

english, 2004

27

Improved performance of GaAs MESFETs through sulfidation of Pt/GaAs interface

Jun-Kyu Yang, Hyung-Ho Park, Haecheon Kim, Ho Won Jang, Jong-Lam Lee, Seongil Im

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 203 KB

english, 2004

28

Low pressure deposition of LixZnyO thin films by means of RF plasma jet system

Z. Hubička, M. Čada, Z. Potůček, P. Ptáček, H. Šı&amp, #x0301, chová, Z. Málková, L. Jastrabı&amp, #x0301, k, B. Trunda

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 249 KB

english, 2004

29

Electrical properties of PZT thin films by photochemical deposition

Hyeong-Ho Park, Sook Yoon, Hyung-Ho Park, Ross H. Hill

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 322 KB

english, 2004

30

Moisture resistance and thermal stability of fluorine-incorporation siloxane-based low-dielectric-constant material

Y.L. Cheng, Y.L. Wang, Y.L. Wu, C.P. Liu, C.W. Liu, J.K. Lan, M.L. O'Neil, Chyung Ay, M.S. Feng

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 162 KB

english, 2004

31

(Pb,Sr)TiO3 thin films etching characteristics using inductively coupled plasma

Gwan-Ha Kim, Kyoung-Tae Kim, Dong-Pyo Kim, Chang-Il Kim

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 114 KB

english, 2004

32

Demonstration of the Stierwalt effect caused by scatter from induced coating defects in multilayer dielectric filters

J.D. Barrie, P.D. Fuqua, B.L. Jones, N. Presser

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 630 KB

english, 2004

33

Structure and tribological behaviour of nanoscale multilayer C/Cr coatings deposited by the combined steered cathodic arc/unbalanced magnetron sputtering technique

P.Eh. Hovsepian, Y.N. Kok, A.P. Ehiasarian, A. Erdemir, J.-G. Wen, I. Petrov

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 1.14 MB

english, 2004

34

Improved mechanical properties of optical coatings via an enhanced sputtering process

G.T. West, P.J. Kelly

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 302 KB

english, 2004

35

The characteristics of aluminium-doped zinc oxide films prepared by pulsed magnetron sputtering from powder targets

Y. Zhou, P.J. Kelly, A. Postill, O. Abu-Zeid, A.A. Alnajjar

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 551 KB

english, 2004

36

Study of TiO2 film growth mechanisms in low-pressure plasma by in situ real-time spectroscopic ellipsometry

A Amassian, P Desjardins, L Martinu

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 215 KB

english, 2004

37

Determination of pore size distribution in thin organized mesoporous silica films by spectroscopic ellipsometry in the visible and infrared range

A. Bourgeois, A. Brunet Bruneau, S. Fisson, B. Demarets, D. Grosso, F. Cagnol, C. Sanchez, J. Rivory

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 250 KB

english, 2004

38

Reactivity of 3D hexagonal mesoporous silica films to environment studied by infrared ellipsometry

A. Brunet-Bruneau, S. Besson, T. Gacoin, J.P. Boilot, J. Rivory

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 119 KB

english, 2004

39

Improving the conductance of ZnO thin films by doping with Ti

Yang-Ming Lu, Chen-Min Chang, Shu-I Tsai, Tzuu-Shaang Wey

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 115 KB

english, 2004

40

Electro-optical and structural properties of thin ZnO films, prepared by filtered vacuum arc deposition

T. David, S. Goldsmith, R.L. Boxman

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 161 KB

english, 2004

41

Growth behavior and optical properties of metal-nanoparticle dispersed dielectric thin films formed by alternating sputtering

S.H. Cho, S. Lee, D.Y. Ku, T.S. Lee, B. Cheong, W.M. Kim, K.S. Lee

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 1.00 MB

english, 2004

42

Amorphous carbon nitride thin films as electron injection layer in organic LEDs

M. Cremona, R. Reyes, C.A. Achete, R. Távora Britto, S.S. Camargo Jr.

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 272 KB

english, 2004

43

Photovoltaic effect in nanocrystalline Pb1−xFexS–single crystal silicon heterojunctions

Rakesh K. Joshi, Satish Mohan, S.K. Agarwal, H.K. Sehgal

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 226 KB

english, 2004

44

The characteristics of thin film electroluminescent displays produced using sol–gel produced tantalum pentoxide and zinc sulfide

Y. Kavanagh, M.J. Alam, D.C. Cameron

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 115 KB

english, 2004

45

Inductively-coupled-plasma reactive ion etching of ZnO using BCl3-based plasmas and effect of the plasma treatment on Ti/Au ohmic contacts to ZnO

Han-Ki Kim, J.W. Bae, K.-K. Kim, S.-J. Park, Tae-Yeon Seong, I. Adesida

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 297 KB

english, 2004

46

Ion beam-induced erosion and humidity effect of MgO protective layer prepared by vacuum arc deposition

Jong-Kuk Kim, Eun-Sung Lee, Dong-Ho Kim, Do-Geun Kim

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 146 KB

english, 2004

47

High rate etching of 6H–SiC in SF6-based magnetically-enhanced inductively coupled plasmas

D.W. Kim, H.Y. Lee, B.J. Park, H.S. Kim, Y.J. Sung, S.H. Chae, Y.W. Ko, G.Y. Yeom

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 632 KB

english, 2004

48

Influence of target-to-substrate distance on the properties of AZO films grown by RF magnetron sputtering

S.H. Jeong, J.H. Boo

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 423 KB

english, 2004

49

n-ZnO/p-Si UV photodetectors employing AlOx films for antireflection

I.-S. Jeong, J.H. Kim, Hyung-Ho Park, Seongil Im

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 127 KB

english, 2004

50

Characteristics of indium tin oxide thin films prepared using electron beam evaporation

Mika Yamaguchi, Ari Ide-Ektessabi, Hiroshi Nomura, Nobuto Yasui

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 99 KB

english, 2004

51

Influence of the film structure on the properties of electrochromic CeO2 thin films deposited by e-beam PVD

I Porqueras, C Person, E Bertran

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 161 KB

english, 2004

52

Dielectric properties of highly (1 0 0) oriented (Pb0.5, Sr0.5)TiO3 thin films grown on LaNiO3 electrodes

Kyoung-Tae Kim, Chang-Il Kim

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 360 KB

english, 2004

53

Fluorine-modified low-k a-SiOC:H composite films prepared by plasma enhanced chemical vapor deposition

Shiuh-Ko JangJean, Chuan-Pu Liu, Ying-Lang Wang, Weng-Sing Hwang, Wei-Tsu Tseng, Sheng-Wen Chen, Kuang-Yao Lo

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 284 KB

english, 2004

54

Monitor and eliminate the circular defects in HDP–STI deposition through oxynitride/oxide composite liner

Jin-Kun Lan, Ying-Lang Wang, Chuan-Pu Liu, Wen His Lee, Chyung Ay, Yi-Lung Cheng, Shih-Chieh Chang

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 746 KB

english, 2004

55

Optical properties of aluminium oxide thin films prepared at room temperature by off-plane filtered cathodic vacuum arc system

Z.W. Zhao, B.K. Tay, G.Q. Yu, D.H.C. Chua, S.P. Lau, L.K. Cheah

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 305 KB

english, 2004

56

Studies on microstructure bilayer film of ultrasonic dipped cadmium sulfide and d.c. sputtered indium tin oxide

H.-N. Cui, V. Teixeira, L.J. Meng, H.-J. Zhang

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 567 KB

english, 2004

57

Structural and dielectric properties of heterostructured BST thin films by sol–gel technique

M. Jain, S.B. Majumder, R.S. Katiyar, A.S. Bhalla

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 294 KB

english, 2004

58

Investigation of the electrical properties and reliability of amorphous SiCN

C.W. Chen, T.C. Chang, P.T. Liu, T.M. Tsai, H.C. Huang, J.M. Chen, C.H. Tseng, C.C. Liu, T.Y. Tseng

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 605 KB

english, 2004

59

Mechanical modelling of multilayer optical coatings

E. G-Berasategui, S.J. Bull, T.F. Page

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 596 KB

english, 2004

60

Structural and electrical properties of metal-ferroelectric-insulator-semiconductor field-effect transistors using a Pt/Bi3.25La0.75Ti3O12/CeO2/Si structure

Jung-Mi Lee, Kyoung-Tae Kim, Chang-Il Kim

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 678 KB

english, 2004

61

An intermediate hybridization in diamond: edge-shared tetrahedra

Andrzej Badzian, Teresa Badzian

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 140 KB

english, 2004

62

Effect of silicon doping on the mechanical and optical properties of carbon nitride thin films

D. Sarangi, R. Sanjinés, A. Karimi

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 545 KB

english, 2004

63

Characterization of ternary boron carbon nitride films synthesized by RF magnetron sputtering

Dong Ho Kim, Eungsun Byon, Sunghun Lee, Jong-Kuk Kim, Hyun Ruh

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 326 KB

english, 2004

64

Corrosion behavior of boron-carbon-nitride films grown by magnetron sputtering

Eungsun Byon, Myungsook Son, Nobuyoshi Hara, Katsuhisa Sugimoto

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 141 KB

english, 2004

65

Mechanical and optical properties of hard SiCN coatings prepared by PECVD

P. Jedrzejowski, J. Cizek, A. Amassian, J.E. Klemberg-Sapieha, J. Vlcek, L. Martinu

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 225 KB

english, 2004

66

Synthesis of thick DLC film for micromachine components

Sadao Takeuchi, Akira Tanji, Hajime Miyazawa, Masao Murakawa

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 834 KB

english, 2004

67

Electron-emission from nano- and micro-crystalline diamond films: the effects of nitrogen and oxygen additives

Soo-Hyung Seo, Tae-Hoon Lee, Young-Do Kim, Chang-Kyun Park, Jin-Seok Park

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 610 KB

english, 2004

68

Interaction of oxygen with a-C:H, a-C films and other carbon materials

V Kulikovsky, V Vorlı́ček, P Bohác, A Kurdyumov, L Jastrabı́k

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 200 KB

english, 2004

69

Mechanical strength improvement of electrical discharge machined cemented carbides through PVD (TiN, TiAlN) coatings

B. Casas, A. Lousa, J. Calderón, M. Anglada, J. Esteve, L. Llanes

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 978 KB

english, 2004

70

A nanoindentation based determination of internal stress alterations in PVD films and their cemented carbides substrates induced by recoating procedures and their effect on the cutting performance

K.-D. Bouzakis, G. Skordaris, S. Hadjiyiannis, A. Asimakopoulos, J. Mirisidis, N. Michailidis, G. Erkens, R. Cremer, F. Klocke, M. Kleinjans

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 2.06 MB

english, 2004

71

A multi-technique approach of tribofilm characterisation

C. Minfray, J.M. Martin, C. Esnouf, T. Le Mogne, R. Kersting, B. Hagenhoff

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 569 KB

english, 2004

72

Phase transition studies of sol–gel deposited barium zirconate titanate thin films

A. Dixit, S.B. Majumder, P.S. Dobal, R.S. Katiyar, A.S. Bhalla

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 447 KB

english, 2004

73

Can oxygen stabilize chromium nitride?—Characterization of high temperature cycled chromium oxynitride

Peter Wilhartitz, Sabine Dreer, Peter Ramminger

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 674 KB

english, 2004

74

Effects of lattice mismatches in ZnO/substrate structures on the orientations of ZnO films and characteristics of SAW devices

Jin-Bock Lee, Myung-Ho Lee, Chang-Kyun Park, Jin-Seok Park

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 173 KB

english, 2004

75

The growth of high-quality SiGe films with an intermediate Si layer

S.W. Lee, P.S. Chen, M.-J. Tsai, C.T. Chia, C.W. Liu, L.J. Chen

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 981 KB

english, 2004

76

Study of the a-Si/a-SiO2 interface deposited by r.f. magnetron sputtering

N. Tomozeiu, E.E. van Faassen, A. Palmero, W.M. Arnoldbik, A.M. Vredenberg, F.H.P.M. Habraken

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 123 KB

english, 2004

77

The tribological properties of co-deposited aluminium–titanium alloy coatings

J. Hampshire, P.J. Kelly, D.G. Teer

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 333 KB

english, 2004

78

Finite element analysis of substrate effects on indentation behaviour of thin films

Zhi-Hui Xu, David Rowcliffe

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 325 KB

english, 2004

79

On the behaviour of indentation fracture in TiAlSiN hard thin films

O. Nakonechna, T. Cselle, M. Morstein, A. Karimi

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 429 KB

english, 2004

80

Fabrication of silicon carbide thin films by plasma immersion ion implantation with self-ignited glow discharge

Zhenghua An, Ricky K.Y. Fu, Peng Chen, Weili Liu, Paul K. Chu, Chenglu Lin

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 148 KB

english, 2004

81

Nanoscale manipulation of tetrahedral amorphous carbon films

Churl Seung Lee, Tae-Young Kim, Kwang Ryeol Lee, Ki Hyun Yoon

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 544 KB

english, 2004

82

Effects of substrate temperature on bonding structure and mechanical properties of amorphous carbon films

S. Chowdhury, M.T. Laugier, I.Z. Rahman

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 246 KB

english, 2004

83

Functionalisation of the carbon nanofibres by plasma treatment

W. Brandl, G. Marginean

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 1.39 MB

english, 2004

84

Thermally activated electron emission from nano-tips of amorphous diamond and carbon nano-tubes

Ming-Chi Kan, Jow-Lay Huang, James Sung, Kuei-Hsien Chen

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 413 KB

english, 2004

85

Atmospheric RF plasma effects on the film adhesion property

Yun M. Chung, Min J. Jung, Jeon G. Han, Min W. Lee, Yong M. Kim

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 346 KB

english, 2004

86

Physical and mechanical properties of polyimide/titania hybrid films

Pei-Chun Chiang, Wha-Tzong Whang, Mei-Hui Tsai, Sheng-Chang Wu

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 361 KB

english, 2004

87

The role of ion energy on the growth mechanism of cubic boron nitride films

S. Eyhusen, H. Hofsäss, C. Ronning

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 504 KB

english, 2004

88

Effects of Si content and free Si on oxidation behavior of Ti–Si–N coating layers

Jun Bo Choi, Kurn Cho, Mi-Hye Lee, Kwang Ho Kim

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 194 KB

english, 2004

89

Stress measurement and stress relaxation during magnetron sputter deposition of cubic boron nitride thin films

B. Abendroth, R. Gago, A. Kolitsch, W. Möller

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 208 KB

english, 2004

90

Effects of bias voltage and temperature on mechanical properties of Ti–Si–N coatings deposited by a hybrid system of arc ion plating and sputtering techniques

Sung Ryong Choi, In-Wook Park, Sang Ho Kim, Kwang Ho Kim

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 205 KB

english, 2004

91

Effect of diamond films as bufferlayer on formation of cubic boron nitride films by chemical vapor deposition

Tien-Syh Yang, Yung-Ping Cheng, Chia-Liang Cheng, Ming-Show Wong

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 508 KB

english, 2004

92

Characteristics of ion beam modified magnesium oxide films

Nobuto Yasui, Hiroshi Nomura, Ari Ide-Ektessabi

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 708 KB

english, 2004

93

DLC based coatings prepared by reactive d.c. magnetron sputtering

K. Bewilogua, R. Wittorf, H. Thomsen, M. Weber

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 613 KB

english, 2004

94

Optical and electrical properties of amorphous carbon films deposited using filtered cathodic vacuum arc with pulse biasing

J.Y. Sze, B.K. Tay, D. Sheeja, S.P. Lau, Y.Q. Fu, Daniel H.C. Chua, W.I. Milne

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 140 KB

english, 2004

95

Ion beam processing of MgO thin films

Ari Ide-Ektessabi, Hiroshi Nomura, Nobuto Yasui, Yuji Tsukuda

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 159 KB

english, 2004

96

Growth of highly-oriented diamond films on 6H–SiC (0001) and Si (111) substrates and the effect of carburization

Tae-Hoon Lee, Soo-Hyung Seo, Seung-Min Kang, Jin-Seok Park

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 779 KB

english, 2004

97

A new technique to determine the elastoplastic properties of thin metallic films using sharp indenters

Jean-Luc Bucaille, Sven Stauss, Patrick Schwaller, Johann Michler

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 261 KB

english, 2004

98

Nanoindentation with spherical indenters: finite element studies of deformation in the elastic–plastic transition regime

Y.J. Park, G.M. Pharr

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 312 KB

english, 2004

99

Factors limiting the measurement of residual stresses in thin films by nanoindentation

C.M. Lepienski, G.M. Pharr, Y.J. Park, T.R. Watkins, A. Misra, X. Zhang

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 360 KB

english, 2004

100

Depth profiling by GDOES: application of hydrogen and d.c. bias voltage corrections to the analysis of thin oxide films

J. Michler, M. Aeberhard, D. Velten, S. Winter, R. Payling, J. Breme

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 137 KB

english, 2004

101

Thermal stability and crystallization studies of amorphous TM–C films

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 291 KB

english, 2004

102

Optical and electronic properties of magnetron sputtered ZrNx thin films

R. Lamni, E. Martinez, S.G. Springer, R. Sanjinés, P.E. Schmid, F. Lévy

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 159 KB

english, 2004

103

Active soft solder deposition by magnetron-sputter-ion-plating (MSIP)-PVD-process

E. Lugscheider, K. Bobzin, A. Erdle

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 688 KB

english, 2004

104

Electrical, optical and mechanical properties of sputtered CrNy and Cr1−xSixN1.02 thin films

E. Martinez, R. Sanjinés, O. Banakh, F. Lévy

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 536 KB

english, 2004

105

Electrical properties of Bi4−xEuxTi3O12 (BET) thin films after etching in inductively coupled CF4/Ar plasma

Kyu-Tae Lim, Kyoung-Tae Kim, Dong-Pyo Kim, Chang-Il Kim

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 153 KB

english, 2004

106

Etching mechanism of Bi4−xLaxTi3O12 films in Ar/Cl2 inductively coupled plasma

Dong-Pyo Kim, Kyoung-Tae Kim, Chang-Il Kim, A.M. Efremov

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 143 KB

english, 2004

107

Effects of ion-implantation on the formation of light-emitting FeSi2 in Fe thin films on (0 0 1)Si

H.T. Lu, L.J. Chen, Y.L. Chueh, L.J. Chou

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 1.20 MB

english, 2004

108

Effect of Bi4Ti3O12 seeding layer on the structural and ferroelectric properties of Bi3.25La0.75Ti3O12 thin films fabricated by a metalorganic decomposition method

Kyoung-Tae Kim, Chang-Il Kim

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 412 KB

english, 2004

109

Effects of MEVVA-implanted chromium on the structure and properties of CrN film

Sheng Han, Hong-Ying Chen, Ku-Ling Chang, Ko-Wei Weng, Da-Yung Wang, Fu-Hsing Lu, Han C. Shih

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 378 KB

english, 2004

110

Deposition of TiOx thin film using the grid-assisting magnetron sputtering

Min J Jung, Yong M Kim, Yun M Chung, Jeon G Han, K.Yoon Bang

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 1.16 MB

english, 2004

111

Effect of substrate bias voltage on amorphous Si–C–N films produced by PVD techniques

L Cunha, C Moura, J Leme, G Andrês, K Pischow

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 161 KB

english, 2004

112

Deposition and mechanical evaluation of superhard Ti–Al–Si–N nanocomposite films by a hybrid coating system

In-Wook Park, Sung Ryong Choi, Ju Hyung Suh, Chan-Gyung Park, Kwang Ho Kim

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 836 KB

english, 2004

113

Structural, optical and mechanical properties of coloured TiNxOy thin films

F Vaz, P Cerqueira, L Rebouta, S.M.C Nascimento, E Alves, Ph Goudeau, J.P Rivière, K Pischow, J de Rijk

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 151 KB

english, 2004

114

Effect of sputtering target power on microstructure and mechanical properties of nanocomposite nc-TiN/a-SiNx thin films

Sam Zhang, Deen Sun, Yongqing Fu, Hejun Du

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 255 KB

english, 2004

115

The role of subsurface oxygen in the local oxidation of zirconium and zirconium nitride thin films

N. Farkas, G. Zhang, K.M. Donnelly, E.A. Evans, R.D. Ramsier, J.A. Dagata

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 233 KB

english, 2004

116

Ed. Board

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 27 KB

english, 2004

117

Author Index

Journal:

Thin Solid Films

Year:

2004

File:

PDF, 35 KB

2004

118

Subject Index

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 102 KB

english, 2004

119

The structure of co-deposited aluminium–titanium alloy coatings

J. Hampshire, P.J. Kelly, D.G. Teer

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 446 KB

english, 2004

120

Dry processing of thin film capacitors arrays using ion beam assisted deposition

Ari Ide-Ektessabi, Hiroki Uehara, Susumu Kamitani

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 191 KB

english, 2004

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