New design of a spectroscopic ellipsometer by using a...

Thin Solid Films 2004 Vol. 455-456; Iss. none

New design of a spectroscopic ellipsometer by using a spectrometer with multiple gratings and a two-dimensional CCD array detector

Hai-Yang You, Jian-Hu Jia, Jian-Ke Chen, Tao Han, Wei-Ming Ni, Song-You Wang, Jin Li, Rong-Jun Zhang, Yue-Mei Yang, Liang-Yao Chen, David W. Lynch
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Volume:
455-456
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2003.11.211
File:
PDF, 292 KB
english, 2004
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