In situ spectroscopic ellipsometry of hydrogen-argon plasma...

Thin Solid Films 2004 Vol. 455-456; Iss. none

In situ spectroscopic ellipsometry of hydrogen-argon plasma cleaned silicon surfaces

Ch. Förster, F. Schnabel, P. Weih, Th. Stauden, O. Ambacher, J. Pezoldt
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
455-456
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2003.11.255
File:
PDF, 485 KB
english, 2004
Conversion to is in progress
Conversion to is failed