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Automated metrology system including VUV spectroscopic ellipsometry and X-ray reflectometry for 300 mm silicon microelectronics
P Boher, P Evrard, O Condat, C Dos Reis, C Defranoux, J.Ph Piel, J.L Stehle, E BellandiVolume:
455-456
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2004.02.006
File:
PDF, 201 KB
english, 2004