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Effect of the tip-sample contact force on the nanostructure size fabricated by local oxidation nanolithography
Kexiang Hu, Sen Wu, Maomao Huang, Xiaodong Hu, Qingkang WangVolume:
115
Year:
2012
Language:
english
Pages:
7
DOI:
10.1016/j.ultramic.2012.01.009
File:
PDF, 1.39 MB
english, 2012