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The role of ion energy on the growth mechanism of cubic boron nitride films
S. Eyhusen, H. Hofsäss, C. RonningVolume:
447-448
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/s0040-6090(03)01082-4
File:
PDF, 504 KB
english, 2004