Effects of bias voltage and temperature on mechanical properties of Ti–Si–N coatings deposited by a hybrid system of arc ion plating and sputtering techniques
Sung Ryong Choi, In-Wook Park, Sang Ho Kim, Kwang Ho KimVolume:
447-448
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/s0040-6090(03)01085-x
File:
PDF, 205 KB
english, 2004