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Effect of diamond films as bufferlayer on formation of cubic boron nitride films by chemical vapor deposition
Tien-Syh Yang, Yung-Ping Cheng, Chia-Liang Cheng, Ming-Show WongVolume:
447-448
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/s0040-6090(03)01086-1
File:
PDF, 508 KB
english, 2004