Deposition of TiOx thin film using the grid-assisting magnetron sputtering
Min J Jung, Yong M Kim, Yun M Chung, Jeon G Han, K.Yoon BangVolume:
447-448
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/s0040-6090(03)01120-9
File:
PDF, 1.16 MB
english, 2004