![](/img/cover-not-exists.png)
Simultaneous measurement of six layers in a silicon on insulator film stack using visible-near-IR spectrophotometry and single-wavelength beam profile reflectometry
J.M. Leng, J.J. Sidorowich, M. Senko, J. OpsalVolume:
313-314
Year:
1998
Language:
english
Pages:
6
DOI:
10.1016/s0040-6090(97)00831-6
File:
PDF, 339 KB
english, 1998