Volume 313-314; Issue none

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Thin Solid Films
Volume 313-314; Issue none

Thin Solid Films

Volume 313-314; Issue none

1

Spectroscopic ellipsometry: a historical overview

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 289 KB

english, 1998

2

Ellipsometric investigations of piezo-optical effects

Manuel Cardona, Daniel Rönnow, Paulo V Santos

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 285 KB

english, 1998

3

Advances in multichannel spectroscopic ellipsometry

R.W Collins, Ilsin An, H Fujiwara, Joungchel Lee, Yiwei Lu, Joohyun Koh, P.I Rovira

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 1.02 MB

english, 1998

4

Spectroscopic ellipsometry data analysis: measured versus calculated quantities

G.E. Jellison, Jr

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 102 KB

english, 1998

5

Evaluation of interferometric ellipsometer systems with a time resolution of one microsecond and faster

K Hemmes, M.A Hamstra, K.R Koops, M.M Wind, T Schram, J de Laet, H Bender

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 359 KB

english, 1998

6

Complete Mueller matrix measurement with a single high frequency modulation

Eric Compain, Bernard Drevillon, Jean Huc, Jean Yves Parey, Jean Eric Bouree

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 508 KB

english, 1998

7

Spectrophotopolarimeter based on multiple reflections in a coated dielectric slab

R.M.A Azzam, A.M El-Saba, M.A.G Abushagur

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 259 KB

english, 1998

8

Broadband spectral operation of a rotating-compensator ellipsometer

J. Opsal, J. Fanton, J. Chen, J. Leng, L. Wei, C. Uhrich, M. Senko, C. Zaiser, D.E. Aspnes

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 188 KB

english, 1998

9

Development of a phase-sensitive ellipsometer and application to the real-time analysis of chromogenic WO3 films during the coloration process

E Masetti, S.E Segre, S Bosch

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 191 KB

english, 1998

10

Spectroscopic ellipsometry with compensator and X-ray specular reflectivity for characterization of thin optical layers on transparent substrates

F. Bertin, A. Chabli, E. Chiariglione, M. Burdin, M. Berger, T. Boudet, O. Lartigue, G. Ravel

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 199 KB

english, 1998

11

Systematic errors in fixed polarizer, rotating polarizer, sample, fixed analyzer spectroscopic ellipsometry

S. Bertucci, A. Pawlowski, N. Nicolas, L. Johann, A. El Ghemmaz, N. Stein, R. Kleim

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 163 KB

english, 1998

12

Simultaneous determination of reflectance spectra along with {ψ(E), Δ(E)} in multichannel ellipsometry: applications to instrument calibration and reduction of real-time data

Ilsin An, Joungchel Lee, Byungyou Hong, R.W Collins

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 192 KB

english, 1998

13

Spectrogoniometry and the WANTED method for thickness and refractive index determination

J.C. Martı́nez-Antón, E. Bernabeu

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 315 KB

english, 1998

14

Effects of depolarization of polarimetric components on null ellipsometry

Soe-Mie F. Nee, Teresa Cole

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 226 KB

english, 1998

15

Depolarization/mixed polarization corrections of ellipsometry spectra

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 109 KB

english, 1998

16

Measurement of the absorption edge of thick transparent substrates using the incoherent reflection model and spectroscopic UV–visible–near IR ellipsometry

M. Kildemo, R. Ossikovski, M. Stchakovsky

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 300 KB

english, 1998

17

Multiple sample analysis of spectroscopic ellipsometry data of semi-transparent films

K. Järrendahl, H. Arwin

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 137 KB

english, 1998

18

Toward a priori selection of ellipsometry angles and wavelengths using a high performance semantic database

F.K. Urban III, David Barton

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 360 KB

english, 1998

19

Multiple minima in the ellipsometric error function

Samuel A Alterovitz, Blaine Johs

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 157 KB

english, 1998

20

Analysis of general ambiguity of inverse ellipsometric problem

V.G Polovinkin, S.N Svitasheva

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 168 KB

english, 1998

21

Analytic representations of the dielectric functions of materials for device and structural modeling

J. Leng, J. Opsal, H. Chu, M. Senko, D.E. Aspnes

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 172 KB

english, 1998

22

Development of a parametric optical constant model for Hg1−xCdxTe for control of composition by spectroscopic ellipsometry during MBE growth

B Johs, C.M Herzinger, J.H Dinan, A Cornfeld, J.D Benson

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 211 KB

english, 1998

23

Analysis of optical spectra by Fourier methods

S.D. Yoo, N.V. Edwards, D.E. Aspnes

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 179 KB

english, 1998

24

A modified learning strategy for neural networks to support spectroscopic ellipsometric data evaluation

László Rédei, Miklós Fried, István Bársony, Hans Wallinga

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 313 KB

english, 1998

25

A new algorithm for real-time thin film thickness estimation given in situ multiwavelength ellipsometry using an extended Kalman filter

C.G. Galarza, P.P. Khargonekar, N. Layadi, T.L. Vincent, E.A. Rietman, J.T.C. Lee

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 256 KB

english, 1998

26

Systematic differences among nominal reference dielectric function spectra for crystalline Si as determined by spectroscopic ellipsometry

K.A. Bell, L. Mantese, U. Rossow, D.E. Aspnes

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 193 KB

english, 1998

27

Characterization of highly strained silicon-germanium alloys grown on silicon substrates using spectroscopic ellipsometry

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 164 KB

english, 1998

28

Optical properties and band structure of Ge1−yCy and Ge-rich Si1−x−yGexCy alloys

K.E. Junge, N.R. Voss, R. Lange, J.M. Dolan, Stefan Zollner, M. Dashiell, D.A. Hits, B.A. Orner, R. Jonczyk, J. Kolodzey

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 157 KB

english, 1998

29

Dielectric function modeling for In1−yAlyAs on InP

Leonard I. Kamlet, Fred L. Terry Jr.

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 268 KB

english, 1998

30

Analysis of ellipsometric and photoemission spectra of diluted magnetic semiconductors by hybridization interaction mechanism

Young-Dong Kim, Yia-Chung Chang, Miles V. Klein

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 143 KB

english, 1998

31

Spectroscopic ellipsometry and low-temperature reflectance: complementary analysis of GaN thin films

N.V Edwards, S.D Yoo, M.D Bremser, M.N Horton, N.R Perkins, T.W Weeks Jr., H Liu, R.A Stall, T.F Kuech, R.F Davis, D.E Aspnes

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 178 KB

english, 1998

32

Spectroscopic ellipsometry characterization of thin-film silicon nitride

G.E. Jellison, Jr, F.A. Modine, P. Doshi, A. Rohatgi

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 140 KB

english, 1998

33

Characterization of the optical properties of PECVD SiNx films using ellipsometry and reflectometry

L Asinovsky, F Shen, T Yamaguchi

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 253 KB

english, 1998

34

Visible and infrared optical constants of electrochromic materials for emissivity modulation applications

Jeffrey S. Hale, Michael DeVries, Brad Dworak, John A. Woollam

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 164 KB

english, 1998

35

Optical properties of lead lanthanum zirconate titanate amorphous thin films

Derui Zhu, Qiujun Li, Tianshu Lai, Dang Mo, Yuhuan Xu, J.D Mackenzie

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 103 KB

english, 1998

36

Spectroscopic ellipsometry characterization of Ba0.7Sr0.3TiO3 thin films prepared by the sol-gel method

Iwao Suzuki, Masahiro Ejima, Kenichi Watanabe, Yi-Ming Xiong, Tadashi Saitoh

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 168 KB

english, 1998

37

Optical characterization of Ru2Si3 by spectroscopic ellipsometry, UV-VIS-NIR spectroscopy and band structure calculations

W Henrion, M Rebien, V.N Antonov, O Jepsen, H Lange

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 173 KB

english, 1998

38

Theoretical and experimental determination of optical and magneto-optical properties of LuFe2 single crystal

S.J. Lee, R.J. Lange, S. Hong, S. Zollner, P.C. Canfield, A.F. Panchula, B.N. Harmon, D.W. Lynch

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 172 KB

english, 1998

39

Ellipsometric study of the influence of the order–disorder phase transition on the optical properties and electronic structures of FeAl alloy films

Y.P Lee, K.W Kim, V.N Antonov, O.V Krasovska, E.E Krasovskii, Yu.V Kudryavtsev, V.V Nemoshkalenko, B.Yu Yavorsky

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 491 KB

english, 1998

40

The medium-related optical constants of noble metals observed by ellipsometric study

Yu Wang, Liang-Yao Chen, Bo Xu, Wei-Ming Zheng, Rong-Jun Zhang, Dong-Liang Qian, Shi-Ming Zhou, Yu-Xiang Zheng, Ning Dai, Yu-Mei Yang, Kou-Bao Ding, Xiu-Miao Zhang

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 174 KB

english, 1998

41

Characterization of epitaxial silicon germanium thin films by spectroscopic ellipsometry

Carlos Ygartua, Ming Liaw

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 232 KB

english, 1998

42

Influence of roughness and grain dimension on the optical functions of polycrystalline silicon films

A. Borghesi, G. Tallarida, G. Amore, F. Cazzaniga, G. Queirolo, M. Alessandri, A. Sassella

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 188 KB

english, 1998

43

Characterization and metrology of the diffusion doped polysilicon using ellipsometry

Leo Asinovsky, Michael Schroth, Fei Shen, John J. Sweeney

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 216 KB

english, 1998

44

Surface disorder production during plasma immersion implantation

T. Lohner, N.Q. Khánh, P. Petrik, L.P. Biró, M. Fried, I. Pintér, W. Lehnert, L. Frey, H. Ryssel, D.J. Wentink, J. Gyulai

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 162 KB

english, 1998

45

Comparative study of polysilicon-on-oxide using spectroscopic ellipsometry, atomic force microscopy, and transmission electron microscopy

P. Petrik, M. Fried, T. Lohner, R. Berger, L.P. Bı́ró, C. Schneider, J. Gyulai, H. Ryssel

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 207 KB

english, 1998

46

Spectroellipsometric characterization of SIMOX with nanometre-thick top Si layers

Tomuo Yamaguchi, Masahiro Nasu, Zhong-Tao Jiang, Michiharu Tabe, Yozo Kanda

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 186 KB

english, 1998

47

Simultaneous measurement of six layers in a silicon on insulator film stack using visible-near-IR spectrophotometry and single-wavelength beam profile reflectometry

J.M. Leng, J.J. Sidorowich, M. Senko, J. Opsal

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 339 KB

english, 1998

48

Optical properties of bonded silicon silicide on insulator (S2OI): a new substrate for electronic and optical devices

V Nayar, J Russell, R.T Carline, A.J Pidduck, C Quinn, A Nevin, S Blackstone

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 314 KB

english, 1998

49

A multi-sample, multi-wavelength, multi-angle investigation of the interface layer between silicon and thermally grown silicon dioxide

C.M. Herzinger, B. Johs, W.A. McGahan, W. Paulson

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 256 KB

english, 1998

50

A spectroscopic immersion ellipsometry study of SiO2-Si interface roughness for electron cyclotron resonance plasma and thermally oxidized Si surfaces

C. Zhao, P.R. Lefebvre, E.A. Irene

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 321 KB

english, 1998

51

Optical characterization of silicon dioxide layers grown on silicon under different growth conditions

Yong Jai Cho, Hyun Mo Cho, Yun Woo Lee, Hoi Youn Lee, In Won Lee, Sang Kil Lee, Jung Woo Sun, Sang Young Moon, Ho Kyoon Chung, Hyun Yong Pang, Sang June Kim, Sang Youl Kim

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 1.17 MB

english, 1998

52

Spectroellipsometric characterization of thin silicon nitride films

Zhong-Tao Jiang, Tomuo Yamaguchi, Mitsuru Aoyama, Yoichiro Nakanishi, Leo Asinovsky

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 203 KB

english, 1998

53

Characterization of PVD TiN uniformity

Leo Asinovsky, Larry E. Frisa

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 265 KB

english, 1998

54

Characterization of titanium nitride (TiN) films on various substrates using spectrophotometry, beam profile reflectometry, beam profile ellipsometry and spectroscopic beam profile ellipsometry

J.M. Leng, J. Chen, J. Fanton, M. Senko, K. Ritz, J. Opsal

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 205 KB

english, 1998

55

An ellipsometric study of Ni, Mo and NixN films deposited on Si

A.A. Tarasenko, L. Jastrabı́k, D. Chvostova, J. Sobota

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 89 KB

english, 1998

56

Spectral dependence of the complex refractive index shift across the semiconductor-metal transition in thermally-oxidized vanadium

S.N Svitasheva, V.N Kruchinin

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 203 KB

english, 1998

57

Generalized ellipsometry and complex optical systems

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 276 KB

english, 1998

58

Characterization of inhomogeneous dielectric films by spectroscopic ellipsometry

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 238 KB

english, 1998

59

Determination of optical anisotropy in calcite from ultraviolet to mid-infrared by generalized ellipsometry

Daniel W. Thompson, Michael J. DeVries, Thomas E. Tiwald, John A. Woollam

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 172 KB

english, 1998

60

Spectroscopic ellipsometry measurements on an anisotropic organic crystal: potassium acid phtalate

A. Sassella, R. Tubino, A. Borghesi, M.E. Giardini, L. Quadrelli

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 107 KB

english, 1998

61

Anisotropic dielectric response and surface aging of mercuric iodide crystal studied by variable angle spectroscopic ellipsometry

H. Yao, Jay C. Erickson, L.A. Lim, Ralph B. James

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 240 KB

english, 1998

62

Spectroscopic ellipsometry studies of the optical properties of doped poly(3,4-ethylenedioxythiophene): an anisotropic metal

Leif A.A. Pettersson, Fredrik Carlsson, Olle Inganäs, Hans Arwin

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 125 KB

english, 1998

63

A spectroscopic anisotropy ellipsometry study of YBa2Cu3O7−x superconductors

A Michaelis, E.A Irene, O Auciello, A.R Krauss, B Veal

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 235 KB

english, 1998

64

In situ measurement of principal refractive indices of thin films by two-angle ellipsometry

Ian Hodgkinson, Judith Hazel, Qi hong Wu

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 193 KB

english, 1998

65

Rotating-compensator multichannel transmission ellipsometry of a thin-film helicoidal bianisotropic medium

P.I Rovira, R.A Yarussi, R.W Collins, V.C Venugopal, A Lakhtakia, R Messier, K Robbie, M.J Brett

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 208 KB

english, 1998

66

Spectroscopic ellipsometric characterization of transparent thin film amorphous electronic materials: integrated analysis

K.V. Popov, A.V. Tikhonravov, J. Campmany, E. Bertran, S. Bosch, A. Canillas

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 143 KB

english, 1998

67

Characterization of graded refractive index silicon oxynitride thin films by spectroscopic ellipsometry

S. Callard, A. Gagnaire, J. Joseph

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 157 KB

english, 1998

68

Composition profiling of graded dielectric function materials by spectroscopic ellipsometry

S. Trolier-McKinstry, J. Koh

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 176 KB

english, 1998

69

Spectroscopic ellipsometry characterization of indium tin oxide film microstructure and optical constants

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 171 KB

english, 1998

70

Plasma etching of submicron devices: in situ monitoring and control by multi-wavelength ellipsometry

H.L. Maynard, N. Layadi, J.T.C. Lee

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 613 KB

english, 1998

71

Complementary in-situ and post-deposition diagnostics of thin film semiconductor structures

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 550 KB

english, 1998

72

A square law for the analysis of real time ellipsometric nucleation and growth data

Y.Z. Hu, C.Y. Zhao, W.X. Gao, E.A. Irene

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 124 KB

english, 1998

73

Atomic scale characterization of the initial stage of hydrogenated silicon growth

Takuya Nakamura, Takeshi Arai, Hajime Shirai

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 244 KB

english, 1998

74

In situ ellipsometry for monitoring nucleation and growth of silicon on silicon dioxide

C Basa, Y.Z Hu, E.A Irene

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 776 KB

english, 1998

75

Real-time monitoring of synchrotron-radiation-excited Si homoepitaxy on Si(100) by spectroscopic ellipsometry

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 178 KB

english, 1998

76

High-speed, high-accuracy optical measurements of polycrystalline silicon for process control

Tyrone E Benson, Arun Ramamoorthy, Leonard I Kamlet, Fred L Terry Jr.

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 157 KB

english, 1998

77

In situ spectroscopic ellipsometry for advanced process control in vertical furnaces

W. Lehnert, R. Berger, C. Schneider, L. Pfitzner, H. Ryssel, J.L. Stehle, J.-P. Piel, W. Neumann

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 181 KB

english, 1998

78

Evaluation of automated spectroscopic ellipsometry for in-line process control — ESPRIT Semiconductor Equipment Assessment (SEA) Project `IMPROVE'

C Pickering, J Russell, V Nayar, J Imschweiler, H Wille, S Harrington, C Wiggins, J.-L Stehlé, J.-P Piel, J Bruchez

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 573 KB

english, 1998

79

An in situ and ex situ ellipsometry comparison of the interfaces of Si and GaAs resulting from thermal and plasma oxidation

P.R. Lefebvre, C. Zhao, E.A. Irene

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 370 KB

english, 1998

80

In situ spectroscopic ellipsometric investigation of vacuum annealed and oxidized porous silicon layers

M Fried, H Wormeester, E Zoethout, T Lohner, O Polgár, I Bársony

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 219 KB

english, 1998

81

Real time spectroscopic ellipsometry for characterization of the crystallization of amorphous silicon by thermal annealing

M. Wakagi, H. Fujiwara, R.W. Collins

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 196 KB

english, 1998

82

Real time spectroscopic ellipsometry for characterization and optimization of amorphous silicon-based solar cell structures

Joohyun Koh, H. Fujiwara, Yiwei Lu, C.R. Wronski, R.W. Collins

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 162 KB

english, 1998

83

Depth-profiles in compositionally-graded amorphous silicon alloy thin films analyzed by real time spectroscopic ellipsometry

H. Fujiwara, Joohyun Koh, R.W. Collins

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 188 KB

english, 1998

84

Adapted wavelength methods for in situ ellipsometry

S. Callard, A. Gagnaire, M.P. Besland, J. Joseph

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 190 KB

english, 1998

85

A direct robust feedback method for growth control of optical coatings by multiwavelength ellipsometry

M. Kildemo, B. Drévillon, O. Hunderi

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 174 KB

english, 1998

86

Real-time monitoring and control of epitaxial semiconductor growth in a production environment by in situ spectroscopic ellipsometry

B Johs, C Herzinger, J.H Dinan, A Cornfeld, J.D Benson, D Doctor, G Olson, I Ferguson, M Pelczynski, P Chow, C.H Kuo, S Johnson

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 180 KB

english, 1998

87

Spectroscopic ellipsometry applied for in-situ control of lattice matched III-V growth in MOVPE

T. Trepk, M. Zorn, J.-T. Zettler, M. Klein, W. Richter

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 202 KB

english, 1998

88

In situ ellipsometric monitoring of GaAs surface modifications during plasma processing: chemistry and kinetics

M Losurdo, P Capezzuto, G Bruno

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 285 KB

english, 1998

89

Application of real-time spectroscopic ellipsometry for the development of low-temperature diamond film growth processes

Joungchel Lee, Byungyou Hong, R Messier, R.W Collins

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 145 KB

english, 1998

90

In situ ellipsometric diagnostics of multilayer thin film deposition during sputtering

Xiang Gao, Darin W Glenn, John A Woollam

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 468 KB

english, 1998

91

Observation of silver film growth using an in situ ultra-high vacuum spectroscopic ellipsometer

Shuichi Kawabata, Kazuki Ishihara, Yoichi Hoshi, Tomoyuki Fukazawa

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 323 KB

english, 1998

92

Spectroscopic ellipsometry on gold clusters embedded in a Si(111) surface

K. Mümmler, P. Wiβmann

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 221 KB

english, 1998

93

Present status and capabilities for the theoretical calculation of surface optical properties

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 135 KB

english, 1998

94

Epioptics: progress and opportunity

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 116 KB

english, 1998

95

Response of the surface dielectric function to dynamic surface modifications: application of reflectance anisotropy spectroscopy and spectroscopic ellipsometry

J.-T. Zettler, M. Pristovsek, T. Trepk, A. Shkrebtii, E. Steimetz, M. Zorn, W. Richter

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 237 KB

english, 1998

96

Interface, surface and bulk anisotropies of heterostructures

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 222 KB

english, 1998

97

H-terminated silicon: spectroscopic ellipsometry measurements correlated to the surface electronic properties

H Angermann, W Henrion, M Rebien, D Fischer, J.-T Zettler, A Röseler

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 155 KB

english, 1998

98

Interpretation of critical point energy shifts in crystalline Si by near-surface localization of excited electronic states

L. Mantese, K.A. Bell, U. Rossow, D.E. Aspnes

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 98 KB

english, 1998

99

Ellipsometric study of tellurium molecular beam interaction with dehydrogenated vicinal silicon surfaces

V.A Shvets, S.I Chikichev, D.N Pridachin, M.V Yakushev, Yu.G Sidorov, A.S Mardezhov

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 175 KB

english, 1998

100

Adsorption of Ga on stepped Si(001) probed by resonant optical second harmonic generation

S. Chandola, M. Cavanagh, J.R. Power, J.F. McGilp

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 116 KB

english, 1998

101

Theory of femtosecond ellipsometry in Ge at 1.5 eV

Stefan Zollner, K.D. Myers, J.M. Dolan, D.W. Bailey, C.J. Stanton

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 145 KB

english, 1998

102

Linear and non-linear spectroscopy of GaAs and GaP: theory versus experiment

A.I. Shkrebtii, J.L.P. Hughes, J.E. Sipe, O. Pulci

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 128 KB

english, 1998

103

Real-time photo-spectroscopic ellipsometry measurement of electric field and composition in semiconductors

R.T. Carline, J. Russell, T.J.C. Hosea, P.J.S. Thomas, C. Pickering

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 148 KB

english, 1998

104

Dielectric changes of GaAs surfaces determined using the Kramers-Kronig analysis of surface photoabsorption spectra

Kunihiko Uwai, Yoshio Watanabe, Naoki Kobayashi

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 157 KB

english, 1998

105

Verification of GaAs/AlAs superlattice theory by spectroscopic ellipsometry

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 90 KB

english, 1998

106

Ellipsometry on monolayer films of InAs and AlAs embedded in GaAs and of InP embedded in GaP

H Schmidt, B Rheinländer, V Gottschalch

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 141 KB

english, 1998

107

Spectral-ellipsometric investigations on semiconductor resonators

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 163 KB

english, 1998

108

Ellipsometric studies on semiconductor microcavity IR-detector structures

Bernd Rheinländer, Jaroslav Kováč, Jan-David Hecht, Jurana Borgulová, František Uherek, Ján Waclawek, Volker Gottschalch, Peter Barna

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 491 KB

english, 1998

109

In-situ As-P exchange monitoring in metal-organic vapor phase epitaxy of InGaAs/InP heterostructure by spectroscopic and kinetic ellipsometry

Shinya Sudo, Yoshiaki Nakano, Masakazu Sugiyama, Yukihiro Shimogaki, Hiroshi Komiyama, Kunio Tada

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 786 KB

english, 1998

110

Real-time growth monitoring of InGaAs/InP-HBT structures with reflectance anisotropy spectroscopy

M. Arens, P. Kurpas, P. Ressel, M. Weyers

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 170 KB

english, 1998

111

Real-time optical characterization of GaP heterostructures by p-polarized reflectance

N. Dietz, K. Ito

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 255 KB

english, 1998

112

Ellipsometric and reflectance-anisotropy measurements on rotating samples

K. Haberland, O. Hunderi, M. Pristovsek, J.-T. Zettler, W. Richter

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 312 KB

english, 1998

113

Spectroscopic ellipsometry in the infrared range

Bernard Drevillon

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 197 KB

english, 1998

114

High accuracy IR ellipsometer working with a Ge Brewster angle reflection polarizer and grid analyzer

Michel Luttmann, Jean-Louis Stehle, Christophe Defranoux, Jean-Philippe Piel

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 520 KB

english, 1998

115

Far infrared ellipsometry using synchrotron radiation: the out-of-plane response of La2−xSrxCuO4

R. Henn, C. Bernhard, A. Wittlin, M. Cardona, S. Uchida

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 210 KB

english, 1998

116

Far infrared ellipsometric measurements of (GaAs)n/(AlxGa1−xAs)n superlattice films by means of synchrotron radiation

E. Wold, J. Bremer, O. Hunderi, B.-O. Fimland

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 172 KB

english, 1998

117

Ellipsometric study of Fano resonance in heavily doped p-type Si and SiGe alloys

J. Humlı́ček

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 188 KB

english, 1998

118

Application of IR variable angle spectroscopic ellipsometry to the determination of free carrier concentration depth profiles

Thomas E. Tiwald, Daniel W. Thompson, John A. Woollam, Wayne Paulson, Robert Hance

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 264 KB

english, 1998

119

Infrared free carrier response of In0.15Ga0.85As0.17Sb0.83 epilayers on GaSb

P.G. Snyder, T.E. Tiwald, D.W. Thompson, N.J. Ianno, J.A. Woollam, M.G. Mauk, Z.A. Shellenbarger

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 123 KB

english, 1998

120

Application of infrared Fourier transform phase-modulated ellipsometry to the characterization of silicon-based amorphous thin films

A. Canillas, E. Pascual, J.L. Andújar, J. Campmany, E. Bertran

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 176 KB

english, 1998

121

Visible and infrared ellipsometry study of ion assisted SiO2 films

D. Souche, A. Brunet-Bruneau, S. Fisson, V. Nguyen Van, G. Vuye, F. Abeles, J. Rivory

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 186 KB

english, 1998

122

Infrared and UV-visible ellipsometric study of WO3 electrochromic thin films

E. Pascual, J. Martı́, E. Garcia, A. Canillas, E. Bertran

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 137 KB

english, 1998

123

Infrared ellipsometry of LiF

J. Humlı́ček

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 195 KB

english, 1998

124

Optical investigations of mixed-phase boron nitride thin films by infrared spectroscopic ellipsometry

M. Schubert, E. Franke, H. Neumann, T.E. Tiwald, D.W. Thompson, J.A. Woollam, J. Hahn

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 240 KB

english, 1998

125

In situ characterization of cubic boron nitride film growth in the IR spectral region

K.-L Barth, W Fukarek, H.-P Maucher, M.F Plass, A Lunk

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 322 KB

english, 1998

126

In situ infrared ellipsometry study of the growth of hydrogenated amorphous carbon thin films

T Heitz, B Drévillon

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 168 KB

english, 1998

127

Infrared ellipsometric analysis of organic film-on-substrate samples

Arnulf Röseler, Ernst-Heiner Korte

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 170 KB

english, 1998

128

IR ellipsometry studies of polymers and oxygen plasma-treated polymers

Corey L. Bungay, Thomas E. Tiwald, Daniel W. Thompson, Michael J. DeVries, John A. Woollam, James F. Elman

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 172 KB

english, 1998

129

Determination of the mid-IR optical constants of water and lubricants using IR ellipsometry combined with an ATR cell

Thomas E. Tiwald, Daniel W. Thompson, John A. Woollam, Stephen V. Pepper

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 321 KB

english, 1998

130

Infrared spectroscopic ellipsometry for residual water detection in annealed sol–gel thin layers

S. Bruynooghe, F. Bertin, A. Chabli, J.-C. Gay, B. Blanchard, M. Couchaud

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 170 KB

english, 1998

131

Non-destructive optical characterisation of chromium conversion layers on aluminium

T. Schram, J. De Laet, H. Terryn

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 214 KB

english, 1998

132

The optical constants of metallic island films as used for surface enhanced infrared absorption

Arnulf Röseler, Ernst-Heiner Korte

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 198 KB

english, 1998

133

In situ infrared spectroscopic ellipsometry for blanket aluminum chemical vapor deposition on TiN and on SiO2/Si

M Weidner, G Weidner, A Hausmann, G Ritter

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 263 KB

english, 1998

134

Deep ultra-violet measurements of SiON anti-reflective coatings by spectroscopic ellipsometry

Christophe Defranoux, Jean-Philippe Piel, Jean-Louis Stehle

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 234 KB

english, 1998

135

Spectroscopic ellipsometry measurements of AlxGa1−xN in the energy range 3–25 eV

T. Wethkamp, K. Wilmers, N. Esser, W. Richter, O. Ambacher, H. Angerer, G. Jungk, R.L. Johnson, M. Cardona

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 241 KB

english, 1998

136

Ellipsometry in the extreme ultraviolet region with multilayer polarizers

Masaki Yamamoto, Minaji Furudate

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 151 KB

english, 1998

137

An anisotropy microellipsometry (AME) study of anodic film formation on Ti and Zr single grains

A. Michaelis, M. Schweinsberg

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 762 KB

english, 1998

138

Spectroscopic ellipsometry and biology: recent developments and challenges

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 405 KB

english, 1998

139

Spectroscopic ellipsometry of electrochemical precipitation and oxidation of nickel hydroxide films

Fanping Kong, Robert Kostecki, Frank McLarnon, Rolf H. Muller

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 240 KB

english, 1998

140

Ellipsometric model for two-dimensional phase transition in Langmuir monolayers

A. Tronin, V. Shapovalov

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 116 KB

english, 1998

141

Anisotropy in Langmuir–Blodgett films studied by generalized spectroscopic ellipsometry

B. Lecourt, D. Blaudez, J.M. Turlet

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 261 KB

english, 1998

142

Spectroscopic ellipsometry of fullerene embedded Langmuir–Blodgett films with surface plasmon excitation

Eugene Bortchagovsky, Igor Yurchenko, Zoya Kazantseva, Josef Humliček, Jaroslav Hora

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 158 KB

english, 1998

143

Application of time-resolved spectroellipsometry to the study of liquid crystal reorientation dynamics

Tomoyuki Fukazawa, Toshiyasu Tadokoro, Hirokazu Toriumi, Tadashi Akahane, Munehiro Kimura

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 356 KB

english, 1998

144

Glass transition temperature and thermal expansion behaviour of polymer films investigated by variable temperature spectroscopic ellipsometry

O. Kahle, U. Wielsch, H. Metzner, J. Bauer, C. Uhlig, C. Zawatzki

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 210 KB

english, 1998

145

Ellipsometric investigation of thick polymer films

K. Forcht, A. Gombert, R. Joerger, M. Köhl

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 245 KB

english, 1998

146

Characterization of biaxially-stretched plastic films by generalized ellipsometry

J.F. Elman, J. Greener, C.M. Herzinger, B. Johs

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 296 KB

english, 1998

147

Investigation of layered microdroplets using ellipsometric techniques

M. Voué, J. De Coninck, S. Villette, M.P. Valignat, A.M. Cazabat

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 449 KB

english, 1998

148

Protein adsorption in thermally oxidized porous silicon layers

S Zangooie, R Bjorklund, H Arwin

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 332 KB

english, 1998

149

Ellipsometric penetration of turbid media: depolarization and surface characterization

M.P. Silverman, Wayne Strange

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 221 KB

english, 1998

150

Application of the degree of polarization to film thickness gradients

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 204 KB

english, 1998

151

A study of quantitative electrochemical analysis through a spectroellipsometric technique with a new function

Z.Q. Huang, S.T. Zhang, C.G. Chen, S.F. Xie, Y.R. Yang, W. Zhu

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 119 KB

english, 1998

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