Characterization of titanium nitride (TiN) films on various substrates using spectrophotometry, beam profile reflectometry, beam profile ellipsometry and spectroscopic beam profile ellipsometry
J.M. Leng, J. Chen, J. Fanton, M. Senko, K. Ritz, J. OpsalVolume:
313-314
Year:
1998
Language:
english
Pages:
6
DOI:
10.1016/s0040-6090(97)00838-9
File:
PDF, 205 KB
english, 1998