In situ spectroscopic ellipsometric investigation of vacuum annealed and oxidized porous silicon layers
M Fried, H Wormeester, E Zoethout, T Lohner, O Polgár, I BársonyVolume:
313-314
Year:
1998
Language:
english
Pages:
5
DOI:
10.1016/s0040-6090(97)00864-x
File:
PDF, 219 KB
english, 1998