In-situ As-P exchange monitoring in metal-organic vapor...

Thin Solid Films 1998 Vol. 313-314; Iss. none

In-situ As-P exchange monitoring in metal-organic vapor phase epitaxy of InGaAs/InP heterostructure by spectroscopic and kinetic ellipsometry

Shinya Sudo, Yoshiaki Nakano, Masakazu Sugiyama, Yukihiro Shimogaki, Hiroshi Komiyama, Kunio Tada
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Volume:
313-314
Year:
1998
Language:
english
Pages:
5
DOI:
10.1016/s0040-6090(97)00894-8
File:
PDF, 786 KB
english, 1998
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