Real-time growth monitoring of InGaAs/InP-HBT structures...

Real-time growth monitoring of InGaAs/InP-HBT structures with reflectance anisotropy spectroscopy

M. Arens, P. Kurpas, P. Ressel, M. Weyers
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Volume:
313-314
Year:
1998
Language:
english
Pages:
5
DOI:
10.1016/s0040-6090(97)00895-x
File:
PDF, 170 KB
english, 1998
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