In situ infrared spectroscopic ellipsometry for blanket aluminum chemical vapor deposition on TiN and on SiO2/Si
M Weidner, G Weidner, A Hausmann, G RitterVolume:
313-314
Year:
1998
Language:
english
Pages:
5
DOI:
10.1016/s0040-6090(97)00988-7
File:
PDF, 263 KB
english, 1998