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Benchmarking of available rigorous electromagnetic field (EMF) simulators for phase-shift mask applications
Christian K Kalus, Steffen List, Andreas Erdmann, Ron Gordon, Martin McCallum, Armin SemmlerVolume:
57-58
Year:
2001
Language:
english
Pages:
8
DOI:
10.1016/s0167-9317(01)00438-5
File:
PDF, 743 KB
english, 2001