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Fabrication of ordered arrays of silicon nanopillars in silicon-on-insulator wafers
A. Wellner, P.R. Preece, J.C. Fowler, R.E. PalmerVolume:
57-58
Year:
2001
Language:
english
Pages:
6
DOI:
10.1016/s0167-9317(01)00457-9
File:
PDF, 971 KB
english, 2001